Start Date
End Date
Shifts
6
Facility
MS
LEC
SAK
Auc id
54230
Btr No
2
Pi
Mr. Manikanthababu Nethala C/o Dr. S.V.S. Nageswara Rao Univ. of Hyderabad Hyderabad
Topic
Ion beam studies of Hafnium based high-k dielectric materials for metal oxide semiconductor device applications
Ion
Ag Au Ni
Energy
120 120 120
Remarks
BTA